{"product_id":"edwards-d37360330-tel-microtim-control-and-communication-module-for-compatible-dry-vacuum-pumps","title":"Edwards D37360330 TEL MicroTIM Control and Communication Module for Compatible Dry Vacuum Pumps","description":"\u003ch4 class=\"PDq2pG_selectionAnchorContainer\"\u003eDescription\u003cspan class=\"PDq2pG_selectionAnchor\"\u003e\u003c\/span\u003e\n\u003c\/h4\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003eThe Edwards D37360330 is a TEL MicroTIM communication module that connects compatible Edwards dry vacuum pumps to process-tool control equipment. It provides parallel control and status monitoring for integration into semiconductor vacuum systems.\u003c\/p\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ch4\u003eTechnical Specifications\u003c\/h4\u003e\n\u003ctable data-path-to-node=\"3\" height=\"356\" style=\"width: 84.3603%;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eCondition\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eNew\/Never Used Surplus\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eEdwards\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eCategory\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eVacuum Equipment\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003ePart Number\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eD37360330\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eSubcategory\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eVacuum Pump Interface Modules\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eMicroTIM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eModule Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eTEL Micro Tool Interface Module\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eInterface Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eParallel digital control and monitoring\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eTool Connector\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e25-pin D-type male plug\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eInstallation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eDedicated MicroTIM slot with captive locking screws\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eCompatible Pump Families\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eEPX, iGX, GX, iXH, and iXL; requires compatible MicroTIM-equipped configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eControl Input Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eVolt-free contact inputs for TEL control functions\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eExternal Contact Rating\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e24 V; sense current 5 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eOutput Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003eNormally open, volt-free contacts\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eMaximum Output Contact Rating\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e24 V, 1 A\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e+5 to +50 °C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eStorage Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e−20 to +70 °C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eOperating Humidity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e10–90% RH at 40 °C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eMaximum Operating Altitude\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e2,000 m\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 36.6194%;\"\u003e\u003cstrong\u003eWeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 63.1724%;\"\u003e0.5 kg (1.10 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ch4\u003eInformation About \u003cspan data-sheets-root=\"1\"\u003eD37360330\u003c\/span\u003e\n\u003c\/h4\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003eThe D37360330 is the TEL version of the Edwards Micro Tool Interface Module family. Its removable construction fits directly into the pumping system’s dedicated MicroTIM slot. The module is specified for compatible EPX, iGX, GX, iXH, and iXL dry pump configurations equipped with the appropriate interface. Intended for tool-level integration, it exchanges discrete commands and pump-status signals through a parallel interface.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eKey Features: \u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003eTEL Tool Interface: Connects compatible TEL process-tool controls to Edwards pumping systems.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eParallel Communication: Exchanges discrete control commands and pump-status signals.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003ePump Operation Control: Supports pump start\/stop commands through the process-tool connection.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eStatus Feedback: Provides pump-running, alarm, and utility-warning outputs where supported.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eD-Type Connector: Uses a 25-pin male connector for the TEL tool interface cable.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eDirect Slot Installation: Fits the dedicated MicroTIM slot and secures with captive locking screws.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eDry Contact Outputs: Provides normally open, volt-free contacts rated up to 24 V and 1 A.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cspan\u003eThe D37360330 delivers the reliability and precision required for coordinated vacuum pump control and status monitoring in semiconductor process equipment.\u003c\/span\u003e\u003c\/p\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":52970678386986,"sku":"D37360330","price":1767.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0800\/0392\/4266\/files\/57_93aa9493-0954-487e-9d85-4f466214806a.png?v=1792179682","url":"https:\/\/iqelectro.com\/products\/edwards-d37360330-tel-microtim-control-and-communication-module-for-compatible-dry-vacuum-pumps","provider":"IQElectro","version":"1.0","type":"link"}