{"product_id":"edwards-stp-xa3203c-magnetically-levitated-turbomolecular-vacuum-pump-for-semiconductor-processing","title":"Edwards STP-XA3203C Magnetically Levitated Turbomolecular Vacuum Pump for Semiconductor Processing","description":"\u003ch4 class=\"PDq2pG_selectionAnchorContainer\"\u003eDescription\u003cspan class=\"PDq2pG_selectionAnchor\"\u003e\u003c\/span\u003e\n\u003c\/h4\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003eThe Edwards STP-XA3203C is a magnetically levitated turbomolecular vacuum pump designed for semiconductor processing and high-vacuum applications. It provides pumping speeds of 3,200 L\/s for nitrogen and 2,300 L\/s for hydrogen, supporting processes that require substantial gas throughput.\u003c\/p\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ch4\u003eTechnical Specifications\u003c\/h4\u003e\n\u003ctable data-path-to-node=\"3\" height=\"356\" style=\"width: 84.3603%; height: 441.063px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eCondition\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eNew\/Never Used Surplus\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eEdwards\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eCategory\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eVacuum Equipment\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003ePart Number\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eSTP-XA3203C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eSubcategory\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eTurbomolecular Vacuum Pumps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eSTP-XA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eBearing System\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eFive-axis magnetic suspension\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eInlet Flange\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eISO320F\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003ePumping Speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eNitrogen: 3,200 L\/s; hydrogen: 2,300 L\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eCompression Ratio\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eNitrogen: \u0026gt;10⁸; hydrogen: \u0026gt;6 × 10³\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eUltimate Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003e1 × 10⁻⁷ Pa order, after bakeout\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 39.1875px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 39.1875px;\"\u003e\u003cstrong\u003eMaximum Allowable Backing Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 39.1875px;\"\u003e266 Pa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eMaximum Gas Flow, Water Cooled\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eNitrogen: 2,300 sccm; argon: 1,900 sccm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eRated Rotational Speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003e27,500 rpm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eStarting Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eApproximately 8 minutes; controller dependent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eMounting Position\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003eAny orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 39.1875px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 39.1875px;\"\u003e\u003cstrong\u003eCooling Water Requirements\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 39.1875px;\"\u003eFlow: 3 L\/min; temperature: 5–25 °C; pressure: 0.3 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eRecommended Purge Gas Flow\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003e50 sccm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003eInput Voltage\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003e200–240 V AC, ±10%\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 19.5938px;\"\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 19.5938px;\"\u003e1.5 kVA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 10px;\"\u003e\n\u003ctd style=\"width: 41.7407%; height: 10px;\"\u003e\u003cstrong\u003eWeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 58.0511%; height: 10px;\"\u003e80 kg (176 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ch4\u003eInformation About \u003cspan data-sheets-root=\"1\"\u003eSTP-XA3203C\u003c\/span\u003e\n\u003c\/h4\u003e\n\u003cp data-pm-slice=\"1 1 []\"\u003eThe STP-XA3203C is part of the Edwards STP-XA series of process turbomolecular pumps. Its five-axis magnetic suspension system supports the rotor during operation. The pump platform incorporates thermal management features intended to reduce corrosion and process deposition. Applications include plasma etching, film deposition, sputtering, and ion implantation, with the specified ISO320F inlet providing the vacuum chamber connection.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eKey Features: \u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003eMagnetic Rotor Suspension: Uses a five-axis magnetic bearing system to support the rotor during operation.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eHigh Pumping Speed: Provides 3,200 L\/s nitrogen and 2,300 L\/s hydrogen pumping capacity.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eGas Compression: Offers compression ratios greater than 10⁸ for nitrogen and greater than 6 × 10³ for hydrogen.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eProcess Gas Throughput: Handles up to 2,300 sccm nitrogen or 1,900 sccm argon under specified water-cooled conditions.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eThermal Management: Incorporates design features that help reduce process deposition and corrosion.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eWater Cooling: Uses a cooling-water supply to manage heat during operation.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eFlexible Installation: Supports mounting in any orientation according to installation requirements.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eISO320F Inlet: Connects to compatible chamber flanges and vacuum hardware.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cspan\u003eThe STP-XA3203C delivers the reliability and precision required for high-vacuum generation and process gas evacuation in semiconductor manufacturing systems.\u003c\/span\u003e\u003c\/p\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":52970890985770,"sku":"STP-XA3203C","price":20999.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0800\/0392\/4266\/files\/57_7e560f47-d378-47b6-9e07-a31725a04165.jpg?v=1792182037","url":"https:\/\/iqelectro.com\/products\/edwards-stp-xa3203c-magnetically-levitated-turbomolecular-vacuum-pump-for-semiconductor-processing","provider":"IQElectro","version":"1.0","type":"link"}