{"product_id":"smc-xgt200-30-1a-x5-high-vacuum-slit-valve-l-motion-gate-valve","title":"SMC XGT200-30-1A-X5 High Vacuum Slit Valve L-Motion Gate Valve","description":"\u003ch4\u003eDescription \u003c\/h4\u003e\n\u003cp data-end=\"356\" data-start=\"19\"\u003e\u003cmeta charset=\"utf-8\"\u003eThe SMC XGT200-30-1A-X5 is a high-vacuum slit valve designed for precise sealing and transfer control in semiconductor manufacturing systems. It utilizes an L-motion mechanism to ensure reliable opening and closing in vacuum environments. This valve is commonly used in wafer processing equipment and high-purity industrial applications.\u003c\/p\u003e\n\u003ch3 data-start=\"486\" data-end=\"509\"\u003e\u003cbr\u003e\u003c\/h3\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003ch4\u003eTechnical Specifications \u003c\/h4\u003e\n\u003ctable style=\"width: 86.3833%;\" height=\"446\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eCondition\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eNew\/Never Used Surplus\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eSMC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eCategory\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eSemiconductor Manufacturing Equipment\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003ePart Number\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eXGT200-30-1A-X5\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eSubcategory\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eVacuum Slit Valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eDevice Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eL-Motion Slit Valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eXGT\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eApplication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eSemiconductor \/ vacuum systems\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eValve Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eGate \/ slit valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eActuation Method\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eL-motion mechanism\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eAssembly Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eBonnet assembly\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eCompatibility\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eNovellus equipment\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eOperating Environment\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eHigh vacuum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eMaterial\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eIndustrial-grade metal construction\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eMounting Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eEquipment integrated\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eCountry of Origin\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eJapan\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 37.1278%;\"\u003e\u003cstrong\u003eWeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 62.5219%;\"\u003eApprox. 14.5 kg \u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003ch4\u003eInformation About\u003cmeta charset=\"utf-8\"\u003e \u003cmeta charset=\"utf-8\"\u003e \u003cspan data-sheets-root=\"1\"\u003eXGT200-30-1A-X5\u003c\/span\u003e\n\u003c\/h4\u003e\n\u003cp data-start=\"399\" data-end=\"899\"\u003e\u003cmeta charset=\"utf-8\"\u003e\u003cmeta charset=\"utf-8\"\u003eThe XGT200-30-1A-X5 is part of SMC’s XGT series of high-vacuum slit valves, engineered for use in semiconductor and cleanroom environments. It is designed to provide airtight isolation between chambers while maintaining stable vacuum conditions. The unit features a bonnet assembly and is often integrated into OEM systems such as Novellus equipment. Its construction supports high reliability and repeatable motion, making it suitable for critical process control in vacuum transfer systems.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong data-start=\"1085\" data-end=\"1102\"\u003eKey Features:\u003cmeta charset=\"utf-8\"\u003e\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul data-start=\"868\" data-end=\"1476\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1526\" data-start=\"876\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"849\" data-end=\"1479\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"876\" data-end=\"1457\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1579\" data-start=\"918\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"864\" data-end=\"1471\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"829\" data-end=\"1430\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1373\" data-start=\"784\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"868\" data-end=\"1446\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1355\" data-start=\"808\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1356\" data-start=\"810\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"753\" data-end=\"1340\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1357\" data-start=\"844\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"878\" data-end=\"1439\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1357\" data-start=\"771\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"798\" data-end=\"1362\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"1030\" data-end=\"1627\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"953\" data-end=\"1631\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1702\" data-start=\"985\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"957\" data-end=\"1667\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1636\" data-start=\"944\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"866\" data-end=\"1451\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1483\" data-start=\"884\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"921\" data-end=\"1516\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1526\" data-start=\"933\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"939\" data-end=\"1545\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"897\" data-end=\"1497\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1554\" data-start=\"982\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"988\" data-end=\"1519\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"940\" data-end=\"1554\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1597\" data-start=\"952\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1598\" data-start=\"944\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"926\" data-end=\"1519\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1495\" data-start=\"907\"\u003e\n\u003cli data-end=\"991\" data-start=\"907\" data-section-id=\"1moxjhw\"\u003eL-motion valve mechanism: Ensures smooth and reliable opening and closing action\u003c\/li\u003e\n\u003cli data-end=\"1076\" data-start=\"992\" data-section-id=\"1avp1oy\"\u003eHigh-vacuum compatibility: Designed for semiconductor and cleanroom environments\u003c\/li\u003e\n\u003cli data-end=\"1136\" data-start=\"1077\" data-section-id=\"tl0h27\"\u003ePrecision sealing: Maintains airtight chamber isolation\u003c\/li\u003e\n\u003cli data-end=\"1219\" data-start=\"1137\" data-section-id=\"trwpn2\"\u003eBonnet assembly design: Integrated structure for durability and serviceability\u003c\/li\u003e\n\u003cli data-end=\"1288\" data-start=\"1220\" data-section-id=\"15u307b\"\u003eOEM integration: Commonly used in Novellus and similar equipment\u003c\/li\u003e\n\u003cli data-end=\"1355\" data-start=\"1289\" data-section-id=\"19h9h40\"\u003eRobust construction: Built for continuous industrial operation\u003c\/li\u003e\n\u003cli data-end=\"1417\" data-start=\"1356\" data-section-id=\"1mn1nxd\"\u003eProcess stability: Supports consistent vacuum performance\u003c\/li\u003e\n\u003cli data-end=\"1495\" data-start=\"1418\" data-section-id=\"1xdck4v\"\u003eSpecialized application: Suitable for wafer handling and transfer systems\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp data-end=\"1626\" data-start=\"1497\"\u003eThe XGT200-30-1A-X5 delivers the reliability and precision required for vacuum control and semiconductor manufacturing processes.\u003c\/p\u003e\n\u003cul data-end=\"1426\" data-start=\"841\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1480\" data-start=\"902\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"871\" data-end=\"1482\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"909\" data-end=\"1577\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1590\" data-start=\"903\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"902\" data-end=\"1573\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"877\" data-end=\"1480\"\u003e\u003c\/ul\u003e\n\u003cul data-start=\"887\" data-end=\"1552\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1526\" data-start=\"891\"\u003e\u003c\/ul\u003e\n\u003cul data-end=\"1499\" data-start=\"843\"\u003e\u003c\/ul\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":51314823790890,"sku":"XGT200-30-1A-X5","price":8997.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0800\/0392\/4266\/files\/1_8bd7fefa-a3d1-4076-a88f-2973ce117e62.jpg?v=1774812584","url":"https:\/\/iqelectro.com\/products\/smc-xgt200-30-1a-x5-high-vacuum-slit-valve-l-motion-gate-valve","provider":"IQElectro","version":"1.0","type":"link"}