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Edwards D37360330 TEL MicroTIM Control and Communication Module for Compatible Dry Vacuum Pumps
- Regular price
- $1,767.00
- Sale price
- $1,767.00
- Regular price
-
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Product Description P/N: D37360330
Description
The Edwards D37360330 is a TEL MicroTIM communication module that connects compatible Edwards dry vacuum pumps to process-tool control equipment. It provides parallel control and status monitoring for integration into semiconductor vacuum systems.
Technical Specifications
| Condition | New/Never Used Surplus |
| Brand | Edwards |
| Category | Vacuum Equipment |
| Part Number | D37360330 |
| Subcategory | Vacuum Pump Interface Modules |
| Series | MicroTIM |
| Module Type | TEL Micro Tool Interface Module |
| Interface Type | Parallel digital control and monitoring |
| Tool Connector | 25-pin D-type male plug |
| Installation | Dedicated MicroTIM slot with captive locking screws |
| Compatible Pump Families | EPX, iGX, GX, iXH, and iXL; requires compatible MicroTIM-equipped configuration |
| Control Input Type | Volt-free contact inputs for TEL control functions |
| External Contact Rating | 24 V; sense current 5 mA |
| Output Type | Normally open, volt-free contacts |
| Maximum Output Contact Rating | 24 V, 1 A |
| Operating Temperature | +5 to +50 °C |
| Storage Temperature | −20 to +70 °C |
| Operating Humidity | 10–90% RH at 40 °C |
| Maximum Operating Altitude | 2,000 m |
| Weight | 0.5 kg (1.10 lb) |
Information About D37360330
The D37360330 is the TEL version of the Edwards Micro Tool Interface Module family. Its removable construction fits directly into the pumping system’s dedicated MicroTIM slot. The module is specified for compatible EPX, iGX, GX, iXH, and iXL dry pump configurations equipped with the appropriate interface. Intended for tool-level integration, it exchanges discrete commands and pump-status signals through a parallel interface.
Key Features:
- TEL Tool Interface: Connects compatible TEL process-tool controls to Edwards pumping systems.
- Parallel Communication: Exchanges discrete control commands and pump-status signals.
- Pump Operation Control: Supports pump start/stop commands through the process-tool connection.
- Status Feedback: Provides pump-running, alarm, and utility-warning outputs where supported.
- D-Type Connector: Uses a 25-pin male connector for the TEL tool interface cable.
- Direct Slot Installation: Fits the dedicated MicroTIM slot and secures with captive locking screws.
- Dry Contact Outputs: Provides normally open, volt-free contacts rated up to 24 V and 1 A.
The D37360330 delivers the reliability and precision required for coordinated vacuum pump control and status monitoring in semiconductor process equipment.
Description
The Edwards D37360330 is a TEL MicroTIM communication module that connects compatible Edwards dry vacuum pumps to process-tool control equipment. It provides parallel control and status monitoring for integration into semiconductor vacuum systems.
Technical Specifications
| Condition | New/Never Used Surplus |
| Brand | Edwards |
| Category | Vacuum Equipment |
| Part Number | D37360330 |
| Subcategory | Vacuum Pump Interface Modules |
| Series | MicroTIM |
| Module Type | TEL Micro Tool Interface Module |
| Interface Type | Parallel digital control and monitoring |
| Tool Connector | 25-pin D-type male plug |
| Installation | Dedicated MicroTIM slot with captive locking screws |
| Compatible Pump Families | EPX, iGX, GX, iXH, and iXL; requires compatible MicroTIM-equipped configuration |
| Control Input Type | Volt-free contact inputs for TEL control functions |
| External Contact Rating | 24 V; sense current 5 mA |
| Output Type | Normally open, volt-free contacts |
| Maximum Output Contact Rating | 24 V, 1 A |
| Operating Temperature | +5 to +50 °C |
| Storage Temperature | −20 to +70 °C |
| Operating Humidity | 10–90% RH at 40 °C |
| Maximum Operating Altitude | 2,000 m |
| Weight | 0.5 kg (1.10 lb) |
Information About D37360330
The D37360330 is the TEL version of the Edwards Micro Tool Interface Module family. Its removable construction fits directly into the pumping system’s dedicated MicroTIM slot. The module is specified for compatible EPX, iGX, GX, iXH, and iXL dry pump configurations equipped with the appropriate interface. Intended for tool-level integration, it exchanges discrete commands and pump-status signals through a parallel interface.
Key Features:
- TEL Tool Interface: Connects compatible TEL process-tool controls to Edwards pumping systems.
- Parallel Communication: Exchanges discrete control commands and pump-status signals.
- Pump Operation Control: Supports pump start/stop commands through the process-tool connection.
- Status Feedback: Provides pump-running, alarm, and utility-warning outputs where supported.
- D-Type Connector: Uses a 25-pin male connector for the TEL tool interface cable.
- Direct Slot Installation: Fits the dedicated MicroTIM slot and secures with captive locking screws.
- Dry Contact Outputs: Provides normally open, volt-free contacts rated up to 24 V and 1 A.
The D37360330 delivers the reliability and precision required for coordinated vacuum pump control and status monitoring in semiconductor process equipment.
