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SMC XGT200-30-1A-X5 High Vacuum Slit Valve L-Motion Gate Valve
- Regular price
- $8,997.00
- Sale price
- $8,997.00
- Regular price
-
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Product Description P/N: XGT200-30-1A-X5
Description
The SMC XGT200-30-1A-X5 is a high-vacuum slit valve designed for precise sealing and transfer control in semiconductor manufacturing systems. It utilizes an L-motion mechanism to ensure reliable opening and closing in vacuum environments. This valve is commonly used in wafer processing equipment and high-purity industrial applications.
Technical Specifications
| Condition | New/Never Used Surplus |
| Brand | SMC |
| Category | Semiconductor Manufacturing Equipment |
| Part Number | XGT200-30-1A-X5 |
| Subcategory | Vacuum Slit Valve |
| Device Type | L-Motion Slit Valve |
| Series | XGT |
| Application | Semiconductor / vacuum systems |
| Valve Type | Gate / slit valve |
| Actuation Method | L-motion mechanism |
| Assembly Type | Bonnet assembly |
| Compatibility | Novellus equipment |
| Operating Environment | High vacuum |
| Material | Industrial-grade metal construction |
| Mounting Type | Equipment integrated |
| Country of Origin | Japan |
| Weight | Approx. 14.5 kg |
Information About XGT200-30-1A-X5
The XGT200-30-1A-X5 is part of SMC’s XGT series of high-vacuum slit valves, engineered for use in semiconductor and cleanroom environments. It is designed to provide airtight isolation between chambers while maintaining stable vacuum conditions. The unit features a bonnet assembly and is often integrated into OEM systems such as Novellus equipment. Its construction supports high reliability and repeatable motion, making it suitable for critical process control in vacuum transfer systems.
Key Features:
- L-motion valve mechanism: Ensures smooth and reliable opening and closing action
- High-vacuum compatibility: Designed for semiconductor and cleanroom environments
- Precision sealing: Maintains airtight chamber isolation
- Bonnet assembly design: Integrated structure for durability and serviceability
- OEM integration: Commonly used in Novellus and similar equipment
- Robust construction: Built for continuous industrial operation
- Process stability: Supports consistent vacuum performance
- Specialized application: Suitable for wafer handling and transfer systems
The XGT200-30-1A-X5 delivers the reliability and precision required for vacuum control and semiconductor manufacturing processes.
Description
The SMC XGT200-30-1A-X5 is a high-vacuum slit valve designed for precise sealing and transfer control in semiconductor manufacturing systems. It utilizes an L-motion mechanism to ensure reliable opening and closing in vacuum environments. This valve is commonly used in wafer processing equipment and high-purity industrial applications.
Technical Specifications
| Condition | New/Never Used Surplus |
| Brand | SMC |
| Category | Semiconductor Manufacturing Equipment |
| Part Number | XGT200-30-1A-X5 |
| Subcategory | Vacuum Slit Valve |
| Device Type | L-Motion Slit Valve |
| Series | XGT |
| Application | Semiconductor / vacuum systems |
| Valve Type | Gate / slit valve |
| Actuation Method | L-motion mechanism |
| Assembly Type | Bonnet assembly |
| Compatibility | Novellus equipment |
| Operating Environment | High vacuum |
| Material | Industrial-grade metal construction |
| Mounting Type | Equipment integrated |
| Country of Origin | Japan |
| Weight | Approx. 14.5 kg |
Information About XGT200-30-1A-X5
The XGT200-30-1A-X5 is part of SMC’s XGT series of high-vacuum slit valves, engineered for use in semiconductor and cleanroom environments. It is designed to provide airtight isolation between chambers while maintaining stable vacuum conditions. The unit features a bonnet assembly and is often integrated into OEM systems such as Novellus equipment. Its construction supports high reliability and repeatable motion, making it suitable for critical process control in vacuum transfer systems.
Key Features:
- L-motion valve mechanism: Ensures smooth and reliable opening and closing action
- High-vacuum compatibility: Designed for semiconductor and cleanroom environments
- Precision sealing: Maintains airtight chamber isolation
- Bonnet assembly design: Integrated structure for durability and serviceability
- OEM integration: Commonly used in Novellus and similar equipment
- Robust construction: Built for continuous industrial operation
- Process stability: Supports consistent vacuum performance
- Specialized application: Suitable for wafer handling and transfer systems
The XGT200-30-1A-X5 delivers the reliability and precision required for vacuum control and semiconductor manufacturing processes.